Remy Bazinette, J.F. Lelievre, Laura Gaudy, Françoise Massines. Influence of the discharge mode on the optical and passivation properties of SiNx:H deposited by PECVD at atmospheric pressure.
Energy Procedia, Elsevier, 2016, 92, pp.309-316.
⟨10.1016/j.egypro.2016.07.087⟩.
⟨hal-01467741⟩