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Journal Articles Thin Solid Films Year : 2014

Sputtered Al-doped ZnO transparent conducting thin films suitable for silicon solar cells

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Abstract

Highly transparent conducting Al-doped zinc oxide (AZO) thin films have been grown onto p-type porous silicon substrates by RF-magnetron sputtering at room temperature using aluminum doped nanocrystalline powder. The obtained AZO films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The films are highly transparent in the visible wavelength region with a transmittance higher than 85% and an electrical resistivity of 1.56 × 10− 4 Ω·cm was obtained at room temperature. On the other hand, we have studied the position of the p–n junction involved in the In2O3:SnO2/(n)AZO/Si(p) structure, by electron-beam induced current technique. Current density–voltage characterizations in dark and under illumination were also investigated. The cell exhibits an efficiency of 5%.
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Dates and versions

hal-01178075 , version 1 (17-07-2015)

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Cite

Z. Ben Ayadi, H. Mahdhi, K. Djessas, J.L. Gauffier, L. El Mir, et al.. Sputtered Al-doped ZnO transparent conducting thin films suitable for silicon solar cells. Thin Solid Films, 2014, 553, pp.123-126. ⟨10.1016/j.tsf.2013.11.120⟩. ⟨hal-01178075⟩
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