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Article Dans Une Revue Plasma Sources Science and Technology Année : 2014

Identification of the different diffuse dielectric barrier discharges obtained between 50 kHz to 9 MHz in Ar/NH3 at atmospheric pressure

Résumé

The aim of this work was to identify the different diffuse dielectric barrier discharges (DBDs) obtained in the same electrode configuration and in the same gas for an excitation frequency ranging from 50 kHz to 9 MHz. The gas mixture was argon with 133 ppm of NH3. This Penning mixture is useful to obtain both low-frequency glow DBDs (GDBDs) and diffuse radio-frequency (RF) discharges. Electrical measurements and short exposure time photographs showed that whatever the frequency, a discharge free of micro-discharge was obtained. In the same configuration, the discharge was a GDBD up to 200 kHz. For frequencies higher than 250 kHz, the discharge behavior was that of a Townsend-like discharge associated with a maximum energy transfer close to the anode and a higher power (about twice that of the GDBD). The cathode fall formation was no longer observed during the discharge current increase because of ion trapping in the gas gap by the rapid electric field oscillations. In the same configuration, the alpha RF mode was observed from 1.3 MHz. Gamma secondary electron emission gave way to electron acceleration by the cathode sheath formation. Bulk ionization was important due to the high electron collision rate at atmospheric pressure. One consequence of the transition from low-frequency to high-frequency discharge was a significant increase in the power (factor ≈30), which reached 35 W cm−3, while the breakdown voltage decreased from 900 V to less than 200 V.
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Dates et versions

hal-01178067 , version 1 (17-07-2015)

Identifiants

Citer

Rémy Bazinette, R Subileau, Jean Paillol, Françoise F. Massines. Identification of the different diffuse dielectric barrier discharges obtained between 50 kHz to 9 MHz in Ar/NH3 at atmospheric pressure. Plasma Sources Science and Technology, 2014, 23 (3), ⟨10.1088/0963-0252/23/3/035008⟩. ⟨hal-01178067⟩
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